By SiTime 82
SiTime's SiT1566 series of MEMs TCXOs are ultra-small, micropower 32.768 kHz TCXOs optimized for battery-powered applications. SiTime's patented TempFlat MEMS™ technology enables the first 32 kHz ±5 ppm super-TCXO in a 1.2 mm2 chip-scale package, the world's smallest footprint. Typical core supply current is only 4.5 μA. The SiT1566 is factory calibrated over multiple temperature points to guarantee extremely precise ±5 ppm all-inclusive frequency stability over a -40°C to +85°C temperature range.
SiTime's MEMS oscillator consists of a MEMS resonator and a programmable analog circuit. SiT1566 MEMS resonator is built with SiTime's unique MEMS First™ process. A key manufacturing step is EpiSeal™ during which the MEMS resonator is annealed with temperatures over 1000°C. EpiSeal creates an extremely strong, clean, vacuum chamber that encapsulates the MEMS resonator and ensures the best performance and reliability.
