High-Performance MEMS Flow Sensor Modules

By IDT, Integrated Device Technology Inc 55

High-Performance MEMS Flow Sensor Modules

Solid-state mass flow sensor modules from IDT measure gas or liquid flow across a sensing surface using the thermo-transfer (calorimetric) principle. The tiny flow sensors utilize a series of MEMS thermocouples which provide excellent signal-to-noise ratio. With solid thermal isolation of the active MEMS sensing element and silicon-carbide film coating, IDT flow sensors deliver excellent abrasive wear resistance and long-term reliability.

IDT offers an un-calibrated millivolt output or fully calibrated and linearized version for either gas or liquid with typical accuracy down to 2% of reading.

Features
  • Measures gas or liquid flow 
  • MEMS thermopile sensing
  • Silicon-carbide coating over MEMS flow sensor
  • Robust solid isolation technology
  • No cavity in MEMS element to cause clogging
  • Resistant to vibration and pressure shock
  • High accuracy, high sensitivity
  • Fast response time
  • Easy cleaning and sterilization
  • 3 VDC to 5 VDC supply options
  • Food-grade compatible version
Applications
  • Industrial process
  • Healthcare
  • Medical devices
  • Automotive systems

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