By IDT, Integrated Device Technology Inc 55
Solid-state mass flow sensor modules from IDT measure gas or liquid flow across a sensing surface using the thermo-transfer (calorimetric) principle. The tiny flow sensors utilize a series of MEMS thermocouples which provide excellent signal-to-noise ratio. With solid thermal isolation of the active MEMS sensing element and silicon-carbide film coating, IDT flow sensors deliver excellent abrasive wear resistance and long-term reliability.
IDT offers an un-calibrated millivolt output or fully calibrated and linearized version for either gas or liquid with typical accuracy down to 2% of reading.
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