Description
The FS1012 MEMS mass flow sensor module measures the flow
rate using the thermo-transfer (calorimetric) principle. The FS1012
is capable of measuring a gas or liquid medium.
The FS1012 offers key advantages over resistor-based flow
solutions. The sensor utilizes thermopile sensing, which provides
an excellent signal-to-noise ratio. The sensor comprises a “solid”
thermal isolation technology and silicon-carbide coating to protect
it from abrasive wear and provides robustness and long-term
reliability. In comparison, other sensors typically contain a fragile
membrane above an etched cavity for the thermal isolation base.
The FS1012 features the sensor fully assembled and wire-bonded
out to a 6-pin header.
Typical Applications
Process controls and monitoring
Oil and gas leak detection
HVAC and air control systems
CPAP and respiratory devices
Automotive mas air flow meter
Liquid dispensing system
Basic Application Circuits
Figure 1. Single-Ended Circuit Example
Features
Gas or liquid mediums
Robust “solid” isolation technology
Resistant to surface contamination
No cavity to cause clogging
Resistant to vibration and pressure shock
Low power application
Sensitive at low flow rates and differential pressure levels
Fast response: 2ms
Millivolt output
Supply voltage: 3V to 5V
Module operating temperature range: 0°C to +85°C
FS1012 Flow Sensor Module
Figure 2. Differential Circuit Example
