FS1012-1020-NG

FS1012 Datasheet
© 2017 Integrated Device Technology, Inc.
4
July 20, 2017
Symbol
Parameter
Conditions
Minimum
Typical
Maximum
Units
Standard Gas Flow Range
[b], [c]
Gas Flow
FS1012-1020-NG
0
2
(2000)
SLPM
(SCCM)
FS1012-1100-NG
0
10
(10000)
SLPM
(SCCM)
Standard Liquid Flow Range
[b], [c]
Liquid Flow
FS1012-1001-LQ
0
0.5
(500)
SLPM
(SCCM)
FS1012-1002-LQ
0
1.0
(1000)
SLPM
(SCCM)
[a] Sensor specifications are tested at the wafer die level.
[b] SLPM: Standard liter per minute.
[c] SCCM: Standard cubic centimeter per minute.
FS1012 Datasheet
© 2017 Integrated Device Technology, Inc.
5
July 20, 2017
Mechanical Drawings
Figure 4. FS1012 Module Dimensions
FS1012 Datasheet
© 2017 Integrated Device Technology, Inc.
6
July 20, 2017
Ordering Information
Note: The part code depends on the application. In the part code, NG refers to “non-corrosive gas” and LQ refers to “liquid.”
Orderable Part Number
Description and Package
Shipping Packaging
Temperature
FS1012-1020-NG
0 to 2 SLPM gas flow sensor mounted on a circuit
board with a flow housing
Box
0°C to +85°C
FS1012-1100-NG
0 to 10 SLPM gas flow sensor mounted on a circuit
board with a flow housing
Box
0°C to +85°C
FS1012-1001-LQ
0 to 0.5 SLPM (500 SCCM) liquid flow sensor
mounted on a circuit board with a flow housing
Box
0°C to +85°C
FS1012-1002-LQ
0 to 1.0 SLPM (1000 SCCM) liquid flow sensor
mounted on a circuit board with a flow housing
Box
0°C to +85°C
Revision History
Revision Date
Description of Change
July 20, 2017
Initial release of the datasheet.
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FS1012-1020-NG

Mfr. #:
Manufacturer:
Description:
THERMAL MASS FLOW SENSOR
Lifecycle:
New from this manufacturer.
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