F3M-S
F3M-S
3
Specifications
J RATINGS/CHARACTERISTICS
Part number F3M-S625 F3M-S626 F3M-S825 F3M-S826 F3M-S1213 F3M-S1225
Sensing object 6-inch (5-inch) semiconductor
silicon wafers and transparent
wafers (with transparency of
92% max.) (See Note.)
8-inch semiconductorsilicon
wafers and transparent wafers
(with transparency of 92% max.)
(See Note.)
12-inch semiconductorsilicon
wafers and 12-inch SIC wafers
(with transparency of 30% max.)
Number of channels 25 26 25 26 13 25
Optical axis pitch 4.76 mm 6.35 mm 10 mm
Optical axis width 1.5 mm
Light source Infrared LED (940 nm)
Pow er supply voltage 12 to 24 V DC r10%, ripple (p-p): 10% max.
Current consumption 120 mA max.
Output Control
output
Load power supply voltage:30 VD C
Load current:20 mA max. (residual voltage: 1 V max.)
Inflow current:20 mA
Parallel output from al l channel s, NPN open coll ector
Dark-ON operation
Answer-back
output
When remote teaching is ON, pin 28 will be used for this function.
Self-
diagnostic
output
Load power
supply vol tage:
30 VDC max.
Load current:
20 mA max.
(Residual
voltage:1 V
max.)
Inflow current:
20 mA
NP N open
collector
--- Load power
supply vol tage:
30 VDC max.
Load current:
20 mA max.
(Residual
voltage:1 V
max.)
Inflow current:
20 mA
NP N open
collector
--- Load power supply voltage:
30 VDC max.
Load current:20 mA max.
(Residual voltage: 1 V max.)
Inflow current:20 mA
NP N open coll ector
Indicators Power Green indicator is ON w hen power is being suppl ied.
Warning R ed indicatoris ON under the foll owing condi tions:
Teaching, no sensing object,insuffici ent light,or error.
Response time 10 ms max.
Control output interrupt input Al l outputs interrupted: GND and control output interrupt input terminals are short-circuited and 0-V
short-circuit current i s 1 mA max.
Output interrupt reset: GND and control outputinterrupt input terminals are opened or the voltage is
between 9 V and the working power suppl y voltage.
Remote ON GND and remote input terminals are short-circuited and 0-V short-circuit current is 1 mA max.
teaching
input
OFF GND and remote input terminals are opened or the vol tage is between 9 V and the working pow er
supply vol tage.
Teaching check function Orange LE D indi cator
Ambient
temperature
Operating 0qCto40qC(32qF to 104qF) w ith no ici ng or condensation 0qCto55qC(32qF to 131qF)
with no icing or condensation
Storage -- 2 5 qCto60qC(--13qF to 140qF) -- 2 5 qCto60qC(--13qF to 140qF)
Relative humidity 35% to 85% with no condensation
Ambientillumination Fluorescent lamp: 1,500 çxmax.
Noise resistance Pow er supply li ne: r480 V i n normal mode with noise simulator
Static electri cal noise: No malfunction or destruction at r8kV
Vi bration resistance 10 to 55 Hz, 0.5-mm double amplitude for 2 hrs each in X, Y, and Z axes
Shock resistance 300 m/s
2
(30G) for 3 times each in X , Y, and Z axes
Degree of protection IEC60529 IP40
Connection Preleaded cabl e (standard cable length:100 mm) Connector
(This table continues on the nextpage.)
