MXR9500MZ

MEMSIC MXR9500G/M Rev.D Page 1 of 8 2/27/2007
Low Cost
±1.5 g Tri Axis Accelerometer with
Ratiometric Outputs
MXR9500G/M
FEATURES
Low cost
RoHS compliant
Resolution better than 1 mg
Tri-axis accelerometer in a single package.
On chip mixed signal processing
No moving parts
No loose particle issues
>50,000 g shock survival rating
SMT package: 7mm X 7mm X 1.8mm
2.7V to 3.6V single supply continuous operation
No adjusting external components needed
APPLICATIONS
GPS
Electronic Compass Tilt Correction/Navigation
Consumer – LCD projectors, pedometers, blood pressure
monitor, digital cameras/MP3 players
Information Appliances – Computer Peripherals/PDA’s/
Cell Phones
Gaming – Joystick/RF Interface/Menu Selection/Tilt
Sensing
Security – Gas Line/Elevator/Fatigue Sensing
GENERAL DESCRIPTION
The MXR9500G/M is a low cost, tri axis accelerometer
fabricated on a standard, submicron CMOS process. It is a
complete sensing system with on-chip mixed signal
processing. The MXR9500G/M measures acceleration with
a full-scale range of ±1.5 g and a sensitivity of 500mV/g
@3.0V at 25
°C. It can measure both dynamic acceleration
(e.g. vibration) and static acceleration (e.g. gravity). The
MXR9500G/M design is based on heat convection and
requires no solid proof mass. This eliminates stiction and
particle problems associated with competitive devices and
provides shock survival greater than 50,000 g, leading to
significantly lower failure rate and lower loss due to
handling during PCB assembly and at customer field
application.
Information furnished by MEMSIC is believed to be accurate and reliable. However,
no responsibility is assumed by MEMSIC for its use, nor for any infringements of
patents or other rights of third parties which may result from its use. No license is
granted by implication or otherwise under any patent or patent rights of MEMSIC.
FUNCTIONAL BLOCK DIAGRAM
The MXR9500G/M provides three ratiometric analog
outputs that are set to 50% of the power supply voltage at
zero g.
The Max. noise floor is 1 mg/
Hz
allowing signals below
1m
g to be resolved at 1 Hz bandwidth. The MXR9500G/M
is packaged in a hermetically sealed, surface mount LCC
16pins package (7 mm x 7 mm x 1.8 mm height) and is
operational over a
-40°C to +85°C (M) and 0°C to +70°C (G)
temperature range.
I
2
C fast mode interface is soon available in the next generation
chip.
©MEMSIC, Inc.
One Technology Drive Suite 325,Andover MA01810,USA
Tel: +1 978 738 0900 Fax: +1 978 738 0196
www.memsic.com
X
Senso
r
Gain Adjust Temp
Com
p
A/D D/A
LPF
Xout
Zout
Yout
Reference
Digital Interface Clock
DI1 SCK1 DI2 SCK2
VDD1
VDD3
VSA1
VSA2
Y
Senso
r
Gain Adjust Temp
Com
p
A/D D/A
LPF
Z
Senso
r
Gain Adjust Temp
Com
p
A/D D/A
LPF
VDD2
MEMSIC MXR9500G/M Rev.D Page 2 of 8
2/27/2007
MXR9500G/M SPECIFICATIONS (Measurements @ 25°C, Acceleration = 0 g unless otherwise noted; VDD1, VDD3 = 3.0V unless
otherwise specified)
Parameter Conditions Min Typ Max Units
Measurement Range
1
Each Axis
±1.5
g
N
onlinearity Best fit straight line 0.5 1.0 % of FS
Alignment Error
2
X, Y-axis
Z-axis
± 1.0
± 3.0
degrees
degrees
Transverse Sensitivity
3
± 2.0
%
Sensitivity
475 500 525 mV/g
Sensitivity Change Over Temperature
Δ from 25°C
15 %
1.45 1.50 1.55 V Zero g Offset Bias Level
-0.1 0.0 +0.1 g
Zero g Offset TC
Δ from 25°C, based on
500mV/g
X,Y-axis
Z-axis
1.0
1.5
m
g/°C
m
g/°C
N
ormal Output Range Output High
Output Low
2.8
0.2
V
V
N
oise Densi
t
y, RMS X,Y-axis
Z-axis
0.6
0.9
m
g/ Hz
m
g/ Hz
Resolution @1Hz BW 0.5 1 mg
Frequency Response @-3dB 17 Hz
Output Drive Capability @2.7V-3.6V 100
μA
Turn-On Time
4
75 mS
Operating Voltage Range 2.7 3.0 3.6 V
Supply Current 4.2 mA
Power Down Current 0.1 uA
Operating Temperature Range MXR9500G
MXR9500M
0
-40
+70
+85
°C
°C
NOTES
1
Guaranteed by measurement of initial offset and sensitivity.
2
Alignment error is specified as the angle between the true and indicated axis of
sensitivity.
3
Cross axis sensitivity is the algebraic sum of the alignment and the inherent
sensitivity errors.
4
Output settled to within ±17mg.
MEMSIC MXR9500G/M Rev.D Page 3 of 8
2/27/2007
ABSOLUTE MAXIMUM RATINGS*
Supply Voltage (V
DD
) ………………...-0.5 to +7.0V
Storage Temperature ……….…………-65°C to +150°C
Acceleration ……………………………………..50,000
g
*Stresses above those listed under Absolute Maximum Ratings may cause permanent
damage to the device. This is a stress rating only; the functional operation of the
device at these or any other conditions above those indicated in the operational
sections of this specification is not implied. Exposure to absolute maximum rating
conditions for extended periods may affect device reliability.
Pin Description: LCC-16 Package
Pin Name Description I/O
1 NC Do Not Connect NC
2 Zout Z Channel Output O
3 VSA2 Connect to Ground I
4 VDD1 2.7V to 3.6V I
5 DI1 Power Down Pin I
6 SCK1 Connect to Ground I
7 NC Do Not Connect NC
8 VSA1 Connect to Ground I
9 NC Do Not Connect NC
10 NC Do Not Connect NC
11 VDD2 2.7V to 3.6V I
12 Yout Y Channel Output O
13 Xout X Channel Output O
14 VDD3 2.7V to 3.6V I
15 SCK2 Connect to Ground I
16 DI2 Power Down Pin I
Ordering Guide
Model
Temperature
Range
Package
MXR9500GZ
0 to 70°C
LCC16,
RoHS compliant
MXR9500MZ
-40 to 85°C
LCC16,
RoHS compliant
All parts are shipped in tape and reel packaging.
Caution: ESD (electrostatic discharge) sensitive device.
Note: Small circle indicates pin one (1).
THEORY OF OPERATION
The MEMSIC device is a complete tri-axis acceleration
measurement system in a single package fabricated on
CMOS IC process. The device operation is based on heat
transfer by natural convection and operates like other
accelerometers having a proof mass except it is a gas in
MEMSIC sensor.
Heat source, centered in the silicon chip is suspended
across a cavity. Equally spaced aluminum/polysilicon
thermopiles (groups of thermocouples) are located
equidistantly on all four sides of the heat source. Under
zero acceleration, a temperature gradient is symmetrical
about the heat source, so that the temperature is the same at
all four thermopiles, causing them to output the same
voltage.
Acceleration in any direction will disturb the temperature
profile, due to free convection heat transfer, causing it to be
asymmetrical. The temperature, and hence voltage output
of the four thermopiles will then be different. The
differential voltage at the thermopile outputs is directly
proportional to the acceleration. Please visit the MEMSIC
website at www.memsic.com for a picture/graphic
description of the free convection heat transfer principle.
+X +Z
+X
+Y
+Z
13
14
15
16
1
2
5 6
7
8
9
10
11 12
4 3
(Top View)
(Side View)

MXR9500MZ

Mfr. #:
Manufacturer:
MEMSIC
Description:
ACCELEROMETER 1.5G ANALOG 16LCC
Lifecycle:
New from this manufacturer.
Delivery:
DHL FedEx Ups TNT EMS
Payment:
T/T Paypal Visa MoneyGram Western Union

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