spirometers, ventilators, and laparoscopy,
as well as industrial air-to-fuel ratio,
analytical instrumentation (spectrometry,
chromatography), fuel cells, gas leak
detection, VAV system on HVAC systems,
gas meters, and HVAC lters.
HONEYWELL ZEPHYR
™
AIRFLOW
SENSORS
HAF Series-High Accuracy.
10 SLPM to 300 SLPM
Features: Industry’s smallest Total Error
Band • High accuracy • Fast response
time • High stability • High sensitivity at
very low ows • High 12 bit resolution
• Industry’s widest airow range • Choice
or port styles • Linear output • Wide
supply voltage range • ASIC-based
I
2
C digital output • Factory or custom
calibration for mulitple gas types • RoHS-
compliant materials
Benets: Industry’s smallest Total Error
Band (TEB) allows for precise airflow
measurement. High accuracy ideal for
use in demanding applications. Fast
response time allows the customer’s
application to respond quickly to airflow
change, important in critical medical
and industrial applications. High stability
reduces errors due to thermal effects and
null shift to provide accurate readings over
time and often eliminating the need for
system calibration after PCB mount and
periodically over time. High sensitivity at
very low flows provides a fast response
time at the onet of cessation of flow. High
12-bit resolution increases the ability to
sense small airflow changes, allowing
customers to more precisely control their
application. Wide airow range measures
mass flow with standard flow ranges
of 10 SLPM to 300 SLPM, or custom
flow ranges, increasing the options for
integrating the sensor into the application
Choice of port styles provide flexibility to
choose the pneumatic connection that is
best for the customer’s application. Linear
output provides a more intuitive sensor
signal than the raw output of basic airflow
sensors, which can help reduce
production costs, design, and
implementation time. Wide supply voltage
range gives the designer the flexibility to
choose the supply voltage that works best
in the system. ASIC-based I
2
C digital
output simplifies integration to
microprocessors or microcontrollers,
reducing PCB complexity and
component count. Factory or custom
calibration for multiple gas types
eliminates need to implement gas
correction factors. RoHS-compliant
materials meet Directive 2002/95/
EC. Designed for use in medical
equipment such as anesthesia delivery
machines, ventilators, ventricular assist
devices (heart pumps), spirometers,
laparoscopy, as well as industrial
analytical instrumentation (spectrometry,
chromatography) air-to-fuel ratio, fuel
cells, fume hoods, gas leak detection,
process control gas monitoring, and
vacuum pump monitoring.
AWM1000 Series.
Features: Precision silicon
micromachining • Sensitivity to low ows
(200 SCCM to 1000 SCCM) • Enhanced
response time • Low power consumption
• Analog output • Cost-effective • Bi-
directional sensing capability • Sensor to
sensor interchangeability • Unamplied
• Laser trimmed • Mass ow and low
differential pressure sensing
Benets: Cost-effective microbridge
technology for potential applications
including HVAC damper control, process
control, respirators, oxygen concentrators,
gas metering, and chromatography.
Differential amplifier circuitry provides
output gain and/or introduces voltage
offsets to sensor output.
AWM2000 Series.
Features: Precision silicon
micromachining • Sensitivity to low ows
(30 SCCM to 1000 SCCM) • Enhanced
response time • Low power consumption
• Analog output • Cost-effective
• Bi-directional sensing capability
• Unamplied • Laser trimmed • Sensor to
sensor interchangeability • Mass ow and
low differential pressure sensing
Benets: Cost-effective microbridge
technology for potential applications
including process control, respirators,
ventilators, oxygen concentrators, and
leak detection equipment. Differential
amplifier circuitry provides output gain
and/or introduces voltage offsets to sensor
output.
AWM3000 Series.
Features: Precision silicon
micromachining • Sensitivity to low ows
(30 SCCM to 1000 SCCM) • Enhanced
response time • Low power consumption
• Analog output • Cost effective • Laser
trimmed • Amplied • Mass ow and low
differential pressure sensing • Sensor to
sensor interchangeability
Benets: Amplified signal conditioning
increases gain and introduces voltage
offsets to sensor output. On-board heater
control circuit. Laser trimmed for improved
sensor interchangeability. Potential
applications include HVAC damper
control, process control, respirators, leak
detection equipment, gas metering, and
chromatography.
AWM5000 Series.
Features: Precision silicon
micromachining • Sensitivity to low
ows (5 SLPM to 20 SLPM) • Enhanced
response time • Low power consumption
• Analog output • Cost-effective • On-
board signal conditioning • Venturi
type ow housing • Remote mounting
capability • Laser trimmed • AMP-
compatible connector • Rugged plastic
package • Amplied • Mass ow pressure
sensing • Sensor to sensor
interchangeability
Benets: Performs amplification,
linearization, temperature compensation,
and gas calibration. Separate gas
calibration types (nitrogen, carbon
dioxide, nitrous oxide or argon).
Microbridge chip in direct contact with
flow stream reduces error due to orifice
or bypass channel clogging. In-line ow
measurement potential applications
including HVAC damper control, oxygen
concentrators, leak detection equipment,
gas metering, and chromatography. 1 Vdc
to 5 Vdc linear output possible regardless
of flow range or calibration gas. Active
laser trimming improves interchangeability.
AMP-compatible connector often provides
reliable connection in demanding
applications.
sensing.honeywell.com 5
