13
D6F-A3 MEMS Flow Sensor
Characteristics/Performance
Note: 1. Volumetric flow rate at 0°C, 101.3 kPa.
Note: 2. Dry gas. (must not contain large particles, e.g., dust, oil, or mist.)
Note: 3. Reference (typical)
Note: 4. With no condensation or icing.
Dimensions (Unit: mm)
● MEMS Flow Sensors
D6F-03A3-000
● Cable (Sold separately)
D6F-CABLE2
Model D6F-03A3-000
Flow Range (See note 1.) 0 to 3 L/min
Calibration Gas (See note 2.) Air
Flow Port Type M5 thread
Electrical Connection Three-pin connector
Power Supply 10.8 to 26.4 VDC
Current Consumption 15 mA max. with no load, with a Vcc of 12 to 24 VDC, and at 25°C
Output Voltage 1 to 5 VDC (non-linear output, load resistance of 10 kΩ)
Accuracy ±5% FS (25°C characteristic)
Repeatability (See note 3.) ±0.7% FS
Output Voltage (Max.) 5.7 VDC (Load resistance: 10 kΩ)
Output Voltage (Min.) 0 VDC (Load resistance: 10 kΩ)
Rated Power Supply Voltage 26.4 VDC
Rated Output Voltage 6 VDC
Case PPS
Degree of Protection IEC IP40 (Excluding tubing sections.)
Withstand Pressure 200 kPa
Pressure Drop (See note 3.) 0.45 kPa
Operating Temperature (See note 4.) 0 to 50°C
Operating Humidity (See note 4.) 35% to 85%
Storage Temperature (See note 4.) −10 to 60°C
Storage Humidity (See note 4.) 35% to 85%
Temperature Characteristics ±5% FS for 25°C characteristic at an ambient temperature of 0 to 50°C
Insulation Resistance Between Sensor outer cover and lead terminals: 20 MΩ min. (at 500 VDC)
Dielectric Strength Between Sensor outer cover and lead terminals: 500 VAC, 50/60 Hz min. for 1 min (leakage current: 1 mA max.)
Weight 5.3 g
MADE IN JAPAN
IN side OUT side
D6F
-03A3-000
M5 threads
(Effective thread depth: 3.1)
3.1
+0.15
−0.05
+0.15
−0.05
3.4-dia.
18
±0.15
36.6
14
16.8
3.1
dia. through hole
8
6.8
18
±0.05
Two,
M3 screw holes
15
±3
(5)
180
±10
3: GND
2: Vout
White wire
Black wire
Red wire
1: Vcc
