Pressure sensors
C28 series Gauge pressure sensor die for back side pressure applications
AS SEN PD 2009-08-03
Please read Cautions and warnings and Page 3 of 8
Important notes at the end of this document.
Absolute maximum ratings
Parameter Symbol Conditions Min. Typ. Max. Unit
Supply voltage
Maximum supply voltage V
DD
Without damage
1)
10 V
Temperature ranges
2)
–40 135 °C
Operating temperature range T
a
For t <15 min –40 140 °C
Storage temperature range T
st
3)
–40 150 °C
Pressure ranges
Operating pressure ranges p
r
Gauge pressure
4)
0 ... 1.6 0 ... 40 bar
Over pressure
p
ov
Gauge pressure
5)
2.5 p
r
Burst pressure
p
berst
Gauge pressure
6)
3 p
r
Electrical specifications
Parameter Symbol Conditions Min. Typ. Max. Unit
Supply voltage / bridge resistance
Operating supply voltage V
DD
7)
1.0 5.0 V
Total bridge resistance R
S
@ 25 °C
8)
2.7 3.2 3.7
kΩ
α
Rs
2.1 2.4 2.7 10
–3
/K
Temperature coefficient
of total bridge resistance
β
Rs
@ 25 °C
9)
4 6 8 10
–6
/K
2
Output signal @ V
DD
= 5 V
Offset V
0
@ 25 °C
10)
–30 0 30 mV
Sensitivity
S @ 25 °C
13)
See next table mV/bar
α
S
–2.5 –2.2 –1.9 10
–3
/K
Temperature coefficient
of the sensitivity
β
S
@ 25 °C
15)
3 5 8 10
–6
/K
2
Pressure hysteresis pHys
16)
–0.1 0.1 % FS
Optional temperature sensing diode
Forward diode voltage V
F
@ 25 °C, I
F
= 50 µA
17)
550 600 650 mV
Temperature coefficient
of forward diode voltage
TCV
F
@ 25 °C, I
F
= 50 µA
18)
–2.4 –2.2 –2.0 mV/K
Long-term stability (Full scale normal output FSON = 120 mV)
Temperature hysteresis of offset THV
0
19)
–0.35 ±0.2 0.35 % FSON
Temperature cycle drift of offset TCDV
0
19)
–0.25 ±0.1 0.25 % FSON
High temperature drift of offset HTDV
0
19)
–0.25 ±0.1 0.25 % FSON
Long term stability of offset LTSV
0
19)
–0.45 ±0.3 0.45 % FSON
