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ADXL001-250BEZ

P1-P3P4-P6P7-P9P10-P12P13-P15P16-P17
ADXL001
Rev. A | Page 9 of 16
07510-026
PERCENT OF POPULATION
5
0
10
20
25
15
30
(mV/g)
2.17
2.18
2.19
2.20
2.21
2.22
2.23
2.24
2.25
2.26
2.27
Figure 11. ADXL001-500, Sensitivity Distribution
07510-027
PERCENT OF POPULATION
5
0
10
20
25
15
30
(mV/g)
2.17
2.18
2.19
2.20
2.21
2.22
2.23
2.24
2.25
2.26
2.28
2.27
2.29
Figure 12. ADXL001-500, Sensitivity Distribution (T
A
= 125°C)
07510-009
PERCENT OF POPULATION
(mV)
5
0
10
15
20
25
360
365
370
375
380
385
390
400
395
405
410
415
420
430
440
425
435
Figure 13. ADXL001-70, Self-Test Delta
07510-028
PERCENT OF POPULATION
(mV)
5
0
10
15
25
20
30
110
112
114
116
118
120
122
126
124
128
130
132
134
138
142
136
140
Figure 14. ADXL001-250, Self-Test Delta
07510-029
PERCENT OF POPULATION
(mV)
5
0
10
15
30
20
40
25
35
55 56 57 58 59 60 61 62 63 64 65 66 67
Figure 15. ADXL001-500, Self-Test Delta
07510-010
PERCENT OF POPULATION
(mA)
5
0
10
15
25
20
30
2.000
2.075
2.150
2.225
2.300
2.375
2.450
2.600
2.525
2.675
2.750
2.825
2.900
Figure 16. I
SUPPLY
Distribution
ADXL001
Rev. A | Page 10 of 16
07510-011
PERCENT OF POPULATION
(mA)
5
0
10
15
35
25
30
20
40
2.100
2.175
2.250
2.325
2.400
2.475
2.550
2.700
2.625
2.775
2.850
2.925
3.000
Figure 17. I
SUPPLY
at 125°C
07510-012
CH1 500mV
B
W
CH2 500mV
B
W
M10.0µs A CH2 1.38V
T 42.80%
Figure 18. Turn-On Characteristic (10 μs per DIV)
ADXL001
Rev. A | Page 11 of 16
THEORY OF OPERATION
DESIGN PRINCIPLES
The ADXL001 accelerometer provides a fully differential sensor
structure and circuit path for excellent resistance to EMI/RFI
interference.
This latest generation SOI MEMS device takes advantage
of mechanically coupled but electrically isolated differential
sensing cells. This improves sensor performance and size
because a single proof mass generates the fully differential
signal. The sensor signal conditioning also uses electrical
feedback with zero-force feedback for improved accuracy
and stability. This force feedback cancels out the electrostatic
forces contributed by the sensor circuitry.
Figure 19 is a simplified view of one of the differential sensor
cell blocks. Each sensor block includes several differential
capacitor unit cells. Each cell is composed of fixed plates attached
to the device layer and movable plates attached to the sensor
frame. Displacement of the sensor frame changes the differential
capacitance. On-chip circuitry measures the capacitive change.
MECHANICAL SENSOR
The ADXL001 is built using the Analog Devices SOI MEMS
sensor process. The sensor device is micromachined in-plane
in the SOI device layer. Trench isolation is used to electrically
isolate, but mechanically couple, the differential sensing elements.
Single-crystal silicon springs suspend the structure over the
handle wafer and provide resistance against acceleration forces.
UNIT
SENSING
CELL
MOVABLE
FRAME
FIXED
PLATES
UNIT
FORCING
CELL
ANCHOR
MOVING
PLATE
PLATE
CAPACITORS
ACCELERATION
ANCHOR
07510-019
Figure 19. Simplified View of Sensor Under Acceleration
P1-P3P4-P6P7-P9P10-P12P13-P15P16-P17

ADXL001-250BEZ

Mfr. #:
Buy ADXL001-250BEZ
Manufacturer:
Analog Devices Inc.
Description:
Accelerometers High Performance Wide Bandwidth
Lifecycle:
New from this manufacturer.
Delivery:
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