Pressure sensors
C32 series Gauge pressure sensor die
Preliminary data
AS SEN PD 2009-08-03
Please read Cautions and warnings and Page 3 of 8
Important notes at the end of this document.
Absolute maximum ratings
Parameter Symbol Conditions Min. Typ. Max. Unit
Supply voltage
Maximum supply soltage V
DD
Without damage
1)
10 V
Temperature ranges
2)
–40 135 °C
Operating temperature range T
a
For t <15 min –40 140 °C
Storage temperature range T
st
3)
–40 150 °C
Pressure ranges
Operating pressure ranges p
r
Gauge pressure
4)
0 ... 1.6 0 ... 40 bar
Over pressure
p
ov
Gauge pressure
5)
2.5 p
r
Burst pressure
p
berst
Gauge pressure
6)
3 p
r
Electrical specifications
Parameter Symbol Conditions Min. Typ. Max. Unit
Supply voltage / bridge resistance
Operating supply voltage V
DD
7)
1.0 5.0 V
Total bridge resistance R
S
@ 25 °C
8)
2.6 3.3 4.0
kΩ
α
Rs
2.0 2.3 2.7 10
–3
/K
Temperature coefficient
of total bridge resistance
β
Rs
@ 25 °C
9)
3 5 8 10
–6
/K
2
Output signal @ V
DD
= 5 V
Offset V
o
@ 25 °C
10)
–25 +25 mV
Sensitivity
S @ 25 °C
13)
See next table mV/bar
TCV
0
–
–12 0 12 µV/VK
Temperature coefficient
of offset
TCV
0
+
Unglued
11)
–6 0 6 µV/VK
α
S
–2.5 –2.2 –1.9 10
–3
/K
Temperature coefficient
of the sensitivity
β
S
@ 25 °C
15)
3 5 8 10
–6
/K
2
Pressure hysteresis pHys
16)
–0.1 0.1 % FS
Long-term stability (Full scale normal output FSON = 120 mV)
Temperature hysteresis of offset THV
0
17)
–0.2 ±0.1 0.2 % FSON
Temperature cycle drift of offset TCDV
0
17)
–0.1 ±0.05 0.1 % FSON
High temperature drift of offset HTDV
0
17)
–0.15 ±0.05 0.15 % FSON
Long term stability of offset LTSV
0
17)
–0.2 ±0.1 0.2 % FSON