NPH Series Specifications
An integrated circuit silicon sensor chip is housed in a
standard TO-8 electrical package that is printed circuit
board mountable.
The latest techniques in micromachining have been
used to ion-implant piezoresistive strain gauges into
a wheatstone bridge configuration that is integrally
formed on a micromachined silicon diaphragm. As with
all NovaSensor silicon sensors, the NPH Series employs
SenStable
®
processing technology, providing excellent
output stability. Constant current excitation to the sen-
sor produces a voltage output that is linearly propor-
tional to the input pressure.
The user can provide standard signal conditioning cir-
cuitry to amplify the 100 mV output signal. The sensor is
compatible with most non-corrosive gases and dry air.
A laser-trimmed, thick-film resistor network on a hybrid
ceramic substrate provides temperature compensation.
Description
Parameter Value Units Notes
General
Pressure Range 0 to 15 psi (0 to 1 bar) 0 to 100 kPa
0 to 30 psi (0 to 2 bar) 0 to 200 kPa
0 to 100 psi (0 to 7 bar) 0 to 700 kPa
Maximum Pressure 4x rated pressure
(8)
Electrical @ 77°F (25°C) Unless Otherwise Stated
Input Excitation 1.5 mA 2 mA maximum
Insulation Resistance 10
8
Ω @ 50 VDC
Input Impedance 4000 Ω ±20%
Output Impedance 5000 Ω ±20%
Bridge Impedance 5000 Ω ±20%
Environmental
Temperature Range
Operating
(9)
Compensated
Vibration
Shock
Life (Dynamic
Pressure Cycle)
–40 to 257
32 to 158
10
100
1 x 10
6
°F
°F
gRMS
g
cycles
(-40°C to 125°C)
(0°C to 70°C)
20 to 2000 Hz
11 milliseconds
Mechanical
(1)
Weight <0.2 oz (<5 g)
Media Compatibility Non-corrosive gases and clean, dry air
Wetted Materials
Top Port
Bottom Port
Nickel, gold plated Kovar, silicone gel, gold
wire, RTV, silicon and glass.
Gold plated Kovar, silicon, glass and RTV (10)
Parameter Units Min. Type Max. Notes
Performance Parameters(7), Compensated(1), 100, 200 and 700 kPa
Offset mV –2 1 2
Full Scale Output mV 75 100 125 2
Linearity %FSO –0.1 0.05 0.1 3
Hysteresis and
Repeatability
%FSO –0.05 0.01 0.05
Thermal Accuracy of Offset
100 kPa %FSO –0.6 0.4 0.6 4
200 and 700 kPa %FSO –0.5 0.2 0.5 4
Thermal Accuracy of FSO
100 kPa %FSO –0.6 0.4 0.6 4
200 & 700 kPa %FSO –0.5 0.2 0.5 4
Thermal Hysteresis %FSO –0.1 0.05 0.1 5
Short-Term
Stability of Offset
µV/V 5 6, 11
Short-Term
Stability of FSO
µV/V 5 6, 11
1. Performance with offset , thermal accuracy of offset , and thermal ac-
curacy of FSO compensation resistors.
2. FSO with 1.5 mA input excitation.
3. Best fit straight line.
4. 32°F to 158°F (0°C to 70°C) with reference to 77°F (25°C)
5. 32°F to 158°F (0°C to 70°C), by design.
6. Normalized offset/bridge voltage—100 hrs, typical value, not tested in
production.
7. All values at 77°F (25°C) and at 1.5 mA, unless otherwise noted.
8. Topside pressure. Backside pressure maximum pressure is 250 psi
(17.23 bar) or 4x rated pressure, whichever is less.
9. Reduced performance outside compensation range.
10. Backside differential tube is nickel or Kovar.
11. Typical specifications are for reference only; absolute values may vary.
