(respiratory monitoring), sleep apnea
machines, spirometers, ventilators, and
laparoscopy, as well as industrial air-
to-fuel ratio, analytical instrumentation
(spectrometry, chromatography), fuel
cells, gas leak detection, VAV system on
HVAC systems, gas meters, and HVAC
filters.
HONEYWELL ZEPHYR
™
AIRFLOW
SENSORS
HAF Series-High Accuracy.
20 SLPM or 200 SLPM
Features: Total Error Band is ±0.5 %FS or
±4.0 of reading, whichever is greater
• High accuracy • Fast response time
• Wide range of airows • Full calibration
and temperature compensation • High
sensitivity at very low ows • Linear
output • Customizable ow ranges and
congurable package styles • High
stability • Low pressure drop • High 12 bit
resolution • Flexible regulated powers
• ASIC-based I
2
C digital output
• Insensitivity to mounting direction
• RoHS-compliant materials • Choice or
port styles • Optimized calibration for
many gases
Benets: Total Error Band is ±0.5 %FS
or ±4.0 of reading, whichever is greater,
allows for precise airflow measurement,
often ideal for demanding applications
with high accuracy requirements. High
accuracy (±3.5 reading) often ideal for
demanding applications. Fast response
time allows a customer’s application
to respond quickly to airflow change.
Measures mass flow with standard flow
ranges of 20 SLPM and 200 SLPM or
custom flow ranges, increasing the
options for integrating the sensor into
the application. Full calibration and
temperature compensation typically
allow the customer to remove additional
components associated with signal
conditioning from the PCB, reducing PCB
size as well as costs often associated
with those components (e.g., acquisition,
inventory, assembly). High stability
at very low flows provides for faster
response time at the onset or cessation
of ow. Customizable ow ranges and
configurable package styles to meet
specific end-user needs. High stability
reduces errors due to thermal effects and
null shift to provide accurate readings
over time, often eliminating need for
system calibration after PCB mount and
periodically over time. Low pressure
drop typically improves patient comfort in
medical applications, and reduces noise
and system wear on other components
such as motors and pumps. High 12-bit
resolution increases ablity to sense small
airflow changes, allowing customers to
more precisely control their application.
Flexible regulated powers from 3 Vdc to
10 Vdc give the designer the exibility to
choose what supply voltage works best
in the system. ASIC-based I
2
C digital
output compatibility eases integration
to microprocessors or microcontrollers,
reducing PCB complexity and component
count. Insensitivity to mounting orientation
allows customer to position sensor in most
optimal point in the system, eliminating
concern for positional effects. RoHS-
compliant materials meet Directive
2002/95/EC. Choice of port styles
(manifold mount, 22 mm OD tapered male
fitting, and G 3/8 female threaded fitting)
provide flexibility to choose the pneumatic
connection that is best for the customer’s
application. Optimized calibration for
many gases, including dry air, helium,
argon, nitrogen, nitrous oxide, and carbon
dioxide eliminates the need to implement
gas correction factors. Designed for
use in medical equipment such as
anesthesia delivery machines, ventilators,
ventricular assist devices (heart pumps),
patient monitoring systems (respiratory
monitoring), spirometers, laparoscopy, as
well as industrial analytical instrumentation
(spectrometry, chromatography) air-to-
fuel ratio, fuel cells, fume hoods, gas leak
detection and gas meters.
AWM1000 Series.
Features: Precision silicon
micromachining • Sensitivity to low ows
(200 SCCM to 1000 SCCM) • Enhanced
response time • Low power consumption
• Analog output • Cost-effective • Bi-
directional sensing capability • Sensor to
sensor interchangeability • Unamplied
• Laser trimmed • Mass ow and low
differential pressure sensing
Benets: Cost-effective microbridge
technology for potential applications
including HVAC damper control, process
control, respirators, oxygen concentrators,
gas metering, and chromatography.
Differential amplifier circuitry provides
output gain and/or introduces voltage
offsets to sensor output.
AWM2000 Series.
Features: Precision silicon
micromachining • Sensitivity to low ows
(30 SCCM to 1000 SCCM) • Enhanced
response time • Low power consumption
• Analog output • Cost-effective
• Bi-directional sensing capability
• Unamplied • Laser trimmed • Sensor to
sensor interchangeability • Mass ow and
low differential pressure sensing
Benets: Cost-effective microbridge
technology for potential applications
including process control, respirators,
ventilators, oxygen concentrators, and
leak detection equipment. Differential
amplifier circuitry provides output gain
and/or introduces voltage offsets to sensor
output.
AWM3000 Series.
Features: Precision silicon
micromachining • Sensitivity to low ows
(30 SCCM to 1000 SCCM) • Enhanced
response time • Low power consumption
• Analog output • Cost effective • Laser
trimmed • Amplied • Mass ow and low
differential pressure sensing • Sensor to
sensor interchangeability
Benets: Amplified signal conditioning
increases gain and introduces voltage
offsets to sensor output. On-board heater
control circuit. Laser trimmed for improved
sensor interchangeability. Potential
applications include HVAC damper
control, process control, respirators, leak
detection equipment, gas metering, and
chromatography.
AWM5000 Series.
Features: Precision silicon
micromachining • Sensitivity to low
ows (5 SLPM to 20 SLPM) • Enhanced
response time • Low power consumption
• Analog output • Cost-effective • On-
sensing.honeywell.com 5
