FS2012-1020-NG

FS2012 Series Datasheet
© 2017 Integrated Device Technology, Inc.
7
July 19, 2017
9. Analog Output
The voltage output is ratiometric to the full scale span. Use the following conversion for the range examples.
Gas (SLPM)
0 to 2 SLPM: Flow = 0.4 Output (V)
0 to 10 SLPM: Flow = 2 Output (V)
Liquid (SCCM)
0 to 500 SCCM: Flow = 100 Output (V)
0 to 1000 SCCM: Flow = 200 Output (V)
Figure 2. Analog Output Example
FS2012 Series Datasheet
© 2017 Integrated Device Technology, Inc.
8
July 19, 2017
10. Mechanical Drawings
Figure 3. FS2012 Module Dimensions
FS2012 Series Datasheet
© 2017 Integrated Device Technology, Inc.
9
July 19, 2017
11. Ordering Information
Note: The part code depends on the application. In the part code, NG refers to “non-corrosive gas” and LQ refers to “liquid.”
For NG parts, the calibration gas is nitrogen. Other calibration gases are available on request.
For LQ parts, the calibration fluid is DI water.
Orderable Part Number
Description and Package
Shipping Packaging
Temperature
FS2012-1020-NG
0 to 2 SLPM calibrated gas flow sensor mounted on a circuit
board with a flow housing; digital I
2
C and analog output
Box
0°C to +85°C
FS2012-1100-NG
0 to 10 SLPM calibrated gas flow sensor mounted on a circuit
board with a flow housing; digital I
2
C and analog output
Box
0°C to +85°C
FS2012-1001-LQ
0 to 0.5 SLPM (500 SCCM) calibrated liquid flow sensor
mounted on a circuit board with a flow housing; digital I
2
C and
analog output
Box
0°C to +85°C
FS2012-1002-LQ
0 to 1.0 SLPM (1000 SCCM) calibrated liquid flow sensor
mounted on a circuit board with a flow housing; digital I
2
C and
analog output
Box
0°C to +85°C
12. Revision History
Revision Date
Description of Change
July 19, 2017
Initial release of the preliminary datasheet.
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FS2012-1020-NG

Mfr. #:
Manufacturer:
IDT
Description:
Flow Sensors Calibrated Mass Flow Snsr, Non-corrosive Gas, 0 to 2 SLPM
Lifecycle:
New from this manufacturer.
Delivery:
DHL FedEx Ups TNT EMS
Payment:
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