High Performance Flow Sensor
Module
FS2012 Series
Datasheet
© 2017 Integrated Device Technology, Inc.
1
July 19, 2017
Description
The FS2012 mass flow sensor module measures the flow across a
sensing surface using the thermo-transfer (calorimetric) principle.
The FS2012 is capable of measuring gas or liquid medium.
The FS2012 offers key advantages over other flow solutions. The
sensor utilizes series of MEMS thermocouples, which provide
excellent signal-to-noise ratio. The solid thermal isolation along
with the silicon-carbide film coating offers excellent abrasive wear
resistance and long-term reliability.
The high temperature material used in the flow channel housing
and base allows for a wide operating temperature.
Wetted materials consist of a proprietary modified PPO plastic,
epoxy, and silicon carbide.
Typical Applications
Process controls and monitoring
Oil and gas leak detection
HVAC and air control systems
CPAP and respiratory devices
Automotive MAF
Liquid dispensing systems
Features
Gas or liquid mediums
Robust solid isolation technology
Resistant to surface contamination
No cavity to cause clogging
Resistant to vibration and pressure shock
Low-power application
High-temperature flow housing
Low signal-to-noise ratio
Analog output: 0V to 5V
Digital output: I
2
C
Supply voltage: 5V
Module operating temperature range: 0°C to +85°C
53.35 x 24.0 mm module with 6-pin header
FS2012 Flow Sensor Module
FS2012 Series Datasheet
© 2017 Integrated Device Technology, Inc.
2
July 19, 2017
Contents
1. Pin Assignments ...........................................................................................................................................................................................3
2. Pin Descriptions ............................................................................................................................................................................................3
3. Absolute Maximum Ratings ..........................................................................................................................................................................4
4. Operating Conditions ....................................................................................................................................................................................4
5. Electrical Characteristics ..............................................................................................................................................................................5
6. Functional Description ..................................................................................................................................................................................6
7. I
2
C
Sensor Interface ......................................................................................................................................................................................6
7.1 Sensor Slave Address........................................................................................................................................................................6
7.2 Data Read ..........................................................................................................................................................................................6
8. Calculating Flow Sensor Output ...................................................................................................................................................................6
9. Analog Output ...............................................................................................................................................................................................7
10. Mechanical Drawings ...................................................................................................................................................................................8
11. Ordering Information .....................................................................................................................................................................................9
12. Revision History ............................................................................................................................................................................................9
List of Figures
Figure 1. Pin Assignments for Module Top View .............................................................................................................................................3
Figure 2. Analog Output Example .......................................................................................................................................................................7
Figure 3. FS2012 Module Dimensions ...............................................................................................................................................................8
List of Tables
Table 1. Pin Descriptions ...................................................................................................................................................................................3
Table 2. Absolute Maximum Ratings .................................................................................................................................................................4
Table 3. Operating Conditions ...........................................................................................................................................................................4
Table 4. Electrical Characteristics .....................................................................................................................................................................5
FS2012 Series Datasheet
© 2017 Integrated Device Technology, Inc.
3
July 19, 2017
1. Pin Assignments
Figure 1. Pin Assignments for Module Top View
Pin 1 2 3 4 5 6
2. Pin Descriptions
Table 1. Pin Descriptions
Pin Number
Pad Name
Type
Description
1
V
IN
Input
Supply voltage
2
SDA
Input/Output
Serial data
3
SCL
Input
Serial clock
4
GND
Ground
Ground
5
MOSI
Do not connect
6
V
OUT
Output
Analog output

SDAF02

Mfr. #:
Manufacturer:
Description:
FS2012 LIQUIDFLOW SENSOR EVALKIT
Lifecycle:
New from this manufacturer.
Delivery:
DHL FedEx Ups TNT EMS
Payment:
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