F3M-S825-1

R
Silicon Wafer Mapping Sensor F3M-S825-1
Allows Simultaneous Mapping of Up
to 25 Silicon Wafers
H
Economical—one sensor detects most
wafer types
H
200 mm wafer size
H
Automatic and remote teaching
capability
H
Self-diagnostic functions reduce
downtime
Ordering Information
Applicable wafer size Number of cassette slots Function Remarks Part number
8 inches (6.35-mm pitch) 25 Self-diagnosis CE marking F3M-S825-1
Application Examples
Detects Transparent Glass Wafers
With a Transparency of 92%
The F3M-S825-1 allows the mapping of cassettes that have both
silicon wafers and glass wafers.
Automatic Teaching Saves Setting Time
(Remote Teaching Available)
The F3M -S825-1 has an autom atic teachi ng functio n th at ensures
easy adjustments in minimal time. The remote teaching function
allows quick, on-the-fly set up.
Answer-back Alarms for Setting Errors and
Self-diagnostic Alarms for Operation Errors
These alarms help reduce system downtime and shorten
troubleshooting time.
Static Electricity Protection
OMRON’s optical system (including emitter and receiver)
prevents malfunction and damage—protecting the Sensor from
static electricity if charged on the semiconductor wafers at the
time of mapping.
F3M-S825-1
F3M-S825-1
2
Specifications
J
RATINGS/CHARACTERISTICS
Item F3M-S825-1
Target object 8-inch semiconductor silicon wafers and transparent wafers
(with transparency of 92% max.) (See Note.)
Number of channels 25
Optical axis pitch 6.35 mm
Optical axis width 1.5 mm
Light source Infrared LED (940 nm)
Power supply voltage 12 to 24 VDC
r
10%, ripple (p-p): 10% max.
Current consumption 120 mA max.
Output
Control output Load power supply voltage: 30 VDC
Load current: 20 mA max. (residual voltage: 1 V max.);
Inflow current: 20 mA.;
Parallel output from all channels, NPN open collector;
Dark-ON operation.
Answer-back output When remote teaching is ON, pin 28 will be used for this function.
Self-diagnostic output Load power supply voltage: 30 VDC max.;
Load current: 20 mA max.
(Residual voltage: 1 V max.);
Inflow current: 20 mA;
NPN open collector.
Indicators Power Green indicator is ON when power is being supplied.
Warning Red indicator is ON under the following conditions:
Teaching, no target object, insufficient light, or error.
Response time 10 ms max.
Control output interrupt input All outputs interrupted: GND and control output interrupt input terminals are
short-circuited and 0-V short-circuit current is 1 mA max.;
Output interrupt reset: GND and control output interrupt input terminals are
opened or the voltage is between 9 V and the working power supply
voltage.
Remote teaching input
ON GND and remote input terminals are short-circuited and 0-V short-circuit
current is 1 mA max.
OFF GND and remote input terminals are opened or the voltage is between
9 V and the working power supply voltage.
Teaching check function Orange LED indicator
Ambient temperature
Operating 0
q
Cto40
q
C(32
q
F to 104
q
F) with no icing or condensation
p
Storage -- 2 5
q
Cto60
q
C(--13
q
F to 140
q
F)
Relative humidity 35% to 85% with no condensation
Ambient illumination Fluorescent lamp: 1,500
ç
xmax.
Noise resistance
Power supply line:
r
480 V in normal mode with noise simulator
Static electrical noise: No malfunction or destruction at
r
8kV
Vibration resistance 10 to 55 Hz, 0.5 mm double amplitude for 2 hrs each in X, Y, and Z axes
Shock resistance 300 m/s
2
(30G) 3 times each in X, Y, and Z axes
Degree of protection IEC60529 IP40
Connection Pre-wired cable (length: 500 mm
r
35 mm)
IDC connector (insulation displacement)
Weight (packed state) Approx. 110 g (3.8 oz)
Material
Optical axis Polycarbonate
Case ABS
Cable Vinyl-insulated, bending type
Accessories Spacer and instruction manual
Note: Operating conditions are restricted for the detection of transparent wafers. Contact your OMRON representatives for details.
F3M-S825-1
F3M-S825-1
3
The remote or manual automatic teaching of the F3M-S825-1 is
possible with the following two sensitivity settings:
1. Max. Sensitivity Setting: Detects semiconductor silicon
wafers, and SIC wafers.
2. Teaching with No Target Object: Detects transparent wafers.
The sensitivity is set to maximum before shipping. Refer to the
Instruction Manual when setting the sensitivity of the F3M-S825-1.
Power indicator Warning indicator
Teaching button
RUN/TEACH mode selector
Teaching indicator
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AUTOMATIC TEACHING FUNCTION
F3M-S825-1
The F3M-S825-1 has an answer-back function to warn the
user about setting errors and a self-diagnostic function to
warn the user about operational errors.
x
Answer-back Function: Normal or error teaching output
turns ON.
x
Self-diagnostic Function: Warning output turns ON for a
decrease in optical input.
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ANSWER-BACK FUNCTION AND
SELF-DIAGNOSTIC FUNCTION
Operation
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OUTPUT CIRCUIT DIAGRAM
+V
Output
(OUT1)
Output (see note)
(OUT26)
0V
Main circuit
Control output interrupt input
Remote teaching input
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I/O TERMINAL ARRANGEMENT
Pin assignment
Pin
Assignment Pin Assignment
1 GND (0 V) 16 OUT14
2 V
CC
(12to24V) 17 OUT15
3 OUT1 18 OUT16
4 OUT2 19 OUT17
5 OUT3 20 OUT18
6 OUT4 21 OUT19
7 OUT5 22 OUT20
8 OUT6 23 OUT21
9 OUT7 24 OUT22
10 OUT8 25 OUT23
11 OUT9 26 OUT24
12 OUT10 27 OUT25
13 OUT11 28 Self-diagnostic output/OUT26
(See Note.)
14 OUT12 29 Control output interrupt input
15 OUT13 30 Remote teaching input
Note: Pin 28 will have answer-back output only when remote
teaching input is turned ON. Otherwise, this output is a
self-diagnostic output.

F3M-S825-1

Mfr. #:
Manufacturer:
Description:
SENSOR COMB 8" WAFER 25 SLOTS
Lifecycle:
New from this manufacturer.
Delivery:
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Payment:
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