B58601H8000A036

Pressure sensors
C32 series
Series/Type: Gauge pressure sensor die
Ordering code:
Date: 2009-08-03
Version: 3
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Identification/Classification 1
(header 1 + top left bar):
Pressure sensors
Identification/Classification 2
(header 2 + bottom left header bar):
C32 series
Ordering code: (top right header bar)
Series/Type: (top right header bar)
Gauge pressure sensor die
Preliminary data (optional):
(if necessary)
Preliminary data
AS SEN PD
EPCOS AG 2015. Reproduction, publication and dissemination of this publication, enclosures hereto and the information
contained therein without EPCOS' prior express consent is prohibited.
EPCOS AG is a TDK Group Company.
Pressure sensors
C32 series Gauge pressure sensor die
Preliminary data
AS SEN PD 2009-08-03
Please read Cautions and warnings and Page 2 of 8
Important notes at the end of this document.
Applications
Medical devices
Automotive
Automation
Features
Piezoresistive MEMS technology
Small dimensions: 1.65 × 1.65 mm
Square diaphragm
Measured media (back side):
Non-aggressive gases and fluids.
Unsuitable for substances which react with
glass or silicon.
Whetstone bridge with mV output,
ratiometric to supply voltage
Rated pressure ranges 1.6 up to 40 bar
Outstanding long-term stability
Delivery mode
Tray / foil
Dimensional drawings
glass
BOROFLOAT
TM
Si 100
400±100
800±20300±5
B Note1
Note1
Note1: geometry of diaphragm depend on
specification
Note2
X2
R3
R1
R4
R2
X1
X5
p
electrical diagram:
allowable edge disruptions
80 µm max.
allowable edge disruptions
50 µm max.
A
150 A B
B
760
260
1425
1650±100
763
X2
X1
X10
1650±100
713
X5
713
713 613
423
X4
X10
125
125
140
X10
X10
X11
X11
50±25
1325
all dimensions in µm
X4
X1 : Vout+
X2 : VDD–
X4 : Vout–
X5 : VDD+
X10 : Substrate
X11 : Shield
Pressure sensors
C32 series Gauge pressure sensor die
Preliminary data
AS SEN PD 2009-08-03
Please read Cautions and warnings and Page 3 of 8
Important notes at the end of this document.
Technical data
Absolute maximum ratings
Parameter Symbol Conditions Min. Typ. Max. Unit
Supply voltage
Maximum supply soltage V
DD
Without damage
1)
10 V
Temperature ranges
2)
–40 135 °C
Operating temperature range T
a
For t <15 min –40 140 °C
Storage temperature range T
st
3)
–40 150 °C
Pressure ranges
Operating pressure ranges p
r
Gauge pressure
4)
0 ... 1.6 0 ... 40 bar
Over pressure
p
ov
Gauge pressure
5)
2.5 p
r
Burst pressure
p
berst
Gauge pressure
6)
3 p
r
Electrical specifications
Parameter Symbol Conditions Min. Typ. Max. Unit
Supply voltage / bridge resistance
Operating supply voltage V
DD
7)
1.0 5.0 V
Total bridge resistance R
S
@ 25 °C
8)
2.6 3.3 4.0
k
α
Rs
2.0 2.3 2.7 10
–3
/K
Temperature coefficient
of total bridge resistance
β
Rs
@ 25 °C
9)
3 5 8 10
–6
/K
2
Output signal @ V
DD
= 5 V
Offset V
o
@ 25 °C
10)
–25 +25 mV
Sensitivity
S @ 25 °C
13)
See next table mV/bar
TCV
0
–12 0 12 µV/VK
Temperature coefficient
of offset
TCV
0
+
Unglued
11)
–6 0 6 µV/VK
α
S
–2.5 –2.2 –1.9 10
–3
/K
Temperature coefficient
of the sensitivity
β
S
@ 25 °C
15)
3 5 8 10
–6
/K
2
Pressure hysteresis pHys
16)
–0.1 0.1 % FS
Long-term stability (Full scale normal output FSON = 120 mV)
Temperature hysteresis of offset THV
0
17)
–0.2 ±0.1 0.2 % FSON
Temperature cycle drift of offset TCDV
0
17)
–0.1 ±0.05 0.1 % FSON
High temperature drift of offset HTDV
0
17)
–0.15 ±0.05 0.15 % FSON
Long term stability of offset LTSV
0
17)
–0.2 ±0.1 0.2 % FSON

B58601H8000A036

Mfr. #:
Manufacturer:
EPCOS / TDK
Description:
Board Mount Pressure Sensors 10.00 C32/2 F00 G08N Pressure Sensor AER
Lifecycle:
New from this manufacturer.
Delivery:
DHL FedEx Ups TNT EMS
Payment:
T/T Paypal Visa MoneyGram Western Union

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